JPH0568102B2 - - Google Patents

Info

Publication number
JPH0568102B2
JPH0568102B2 JP62214345A JP21434587A JPH0568102B2 JP H0568102 B2 JPH0568102 B2 JP H0568102B2 JP 62214345 A JP62214345 A JP 62214345A JP 21434587 A JP21434587 A JP 21434587A JP H0568102 B2 JPH0568102 B2 JP H0568102B2
Authority
JP
Japan
Prior art keywords
wafer
jig
wafers
chuck
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62214345A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6457730A (en
Inventor
Takayasu Asano
Kenichi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP62214345A priority Critical patent/JPS6457730A/ja
Publication of JPS6457730A publication Critical patent/JPS6457730A/ja
Publication of JPH0568102B2 publication Critical patent/JPH0568102B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62214345A 1987-08-28 1987-08-28 Wafer shifting method Granted JPS6457730A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62214345A JPS6457730A (en) 1987-08-28 1987-08-28 Wafer shifting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214345A JPS6457730A (en) 1987-08-28 1987-08-28 Wafer shifting method

Publications (2)

Publication Number Publication Date
JPS6457730A JPS6457730A (en) 1989-03-06
JPH0568102B2 true JPH0568102B2 (en]) 1993-09-28

Family

ID=16654225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214345A Granted JPS6457730A (en) 1987-08-28 1987-08-28 Wafer shifting method

Country Status (1)

Country Link
JP (1) JPS6457730A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5626207A (en) * 1995-10-23 1997-05-06 Micron Technology, Inc. Manual wafer lift
KR100306301B1 (ko) * 1998-11-17 2001-10-20 정문술 모듈아이씨핸들러에서고객트레이내의모듈아이씨픽킹방법및그장치
JP3384446B2 (ja) 1999-01-08 2003-03-10 日本電気株式会社 表示パネル製造方法及び表示パネル移載方法
JP4668350B1 (ja) * 2010-05-28 2011-04-13 イーティーシステムエンジニアリング株式会社 半導体ウェーハの分離装置

Also Published As

Publication number Publication date
JPS6457730A (en) 1989-03-06

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